?????? ??????
?????? ???? ??????? Toward
????? ????????? ???????? ?????????? ?????? ???????? ??????? ???? ?????? ?? ?? ?????.
???? ????? ??????? ?????? ?????? Opto-MOSFET? ??????? ???? ??????? RF MEMS. ??? ???? ??????? ???? ????? ??????? ?????? ????? ????????? ATE? ????? ????? ????????? (BMS)? ?????? ???????? ?????? ???????? ??????????.
????? ????????? ???????? ?????????? ?????? ???????? ??????? ???? ?????? ?? ?? ?????.
??? ?? ?????? ??? ??? 1988? Bright Toward Industrial ?? ???? ????? ????????. ???? ???????? ????????? ??? ?? ??? ?????? Opto-MOSFET? ??????? Opto-SiC MOSFET? ??????? ?????? ??????? ??????? Reed? ??????? RF MEMS? ??????.
????? B.T ????????? ??????? ??????? ??????????? ????????? ?? ???? ????? ?????? ????? ?? ????? ???? ?????? ?????? ????? ????? ?? OKITA Works ????? ?? ???????? Menlo Microsystems ????? ?? ??????????? JEL Systems ????? ?? ??????? ? Teledyne Relays and Coax Switches ????? ?? ??????????. ???? ???? ????? ????? ?????? ??????? ??????????? ?????? ???????? ????? ?????? ????? ????????? (BMS) ?????? ?????? ???????? ?????? ???????? ??????????.
???? B.T ??????? ??????? Opto-MOSFET ? Opto-SiC MOSFET ????? ?????? ??? ??? 1988? ?? ????????? ?????? ????? ???? ???? 30 ?????? ???? B.T ????? ????? ?? ????.