???? ?????????
?? ??? ??? ????????? ???????, ?????? ??? ????? ????????? ???????. ????? ?? ?????? ???? ????? ??? pdf ??? ???? ????? ??????????. ???? ?????? ??? ???? ?????? ??? ???? ???? ????????? ???? ????.
Bright Toward Industrial ?? ???? ????? ??????? ?????? ??????? ???????? ??????? ???????? ??????? MEMS.. ????? ?????? ?????? ?????? Opto-MOSFET? ???????? ??????? ???????? ??????? RF MEMS. ??? ???? ??????? ???? ????? ?????? ?????? ????? ????????? ??????? ??????? ??????? ?????? ????? ?????????? ??????? ????????? ?????? ???????? ??????????.
?? ??? ??? ????????? ???????, ?????? ??? ????? ????????? ???????. ????? ?? ?????? ???? ????? ??? pdf ??? ???? ????? ??????????. ???? ?????? ??? ???? ?????? ??? ???? ???? ????????? ???? ????.
??? ?? ?????? ??? ??? 1988? Bright Toward Industrial ?? ???? ????? ????????. ???? ???????? ????????? ??? ?? ??? ?????? Opto-MOSFET? ??????? Opto-SiC MOSFET? ??????? ?????? ??????? ??????? Reed? ??????? RF MEMS? ??????.
????? B.T ????????? ??????? ??????? ??????????? ????????? ?? ???? ????? ?????? ????? ?? ????? ???? ?????? ?????? ????? ????? ?? OKITA Works ????? ?? ???????? Menlo Microsystems ????? ?? ??????????? JEL Systems ????? ?? ??????? ? Teledyne Relays and Coax Switches ????? ?? ??????????. ???? ???? ????? ????? ?????? ??????? ??????????? ?????? ???????? ????? ?????? ????? ????????? (BMS) ?????? ?????? ???????? ?????? ???????? ??????????.
???? B.T ??????? ??????? Opto-MOSFET ? Opto-SiC MOSFET ????? ?????? ??? ??? 1988? ?? ????????? ?????? ????? ???? ???? 30 ?????? ???? B.T ????? ????? ?? ????.