B.T ?? ???? ???????? ?????? ?? ????? ???????? ???????? ??? ??? 1988 ????? RF MEMS .?????? ??????? ???????? ?????? ?????? ???????-??????? ??????? ?????? ???????? ??????? RF MEMS.??? ???? ???? ????? ????? ?????? ??????? ??????????? ? ATE ? BMS (????? ????? ????????) ??????? ???????? ?????? ???????? ??????????.
??? ??????? RF MEMS SP4T ???? ?????? ????? ????? ???????...
???? ????
??? ?? ????? RF MEMS ???????? ??????? (DC ??? 18 ????????)...
???? ????
??? ?? ????? RF MEMS ???????? ?????? ???? ?????? SP4T (?????...
???? ????
??? ???? ????? RF MEMS ?????? ??????? ??????? ???????...
???? ??????? ?? ?????? ??? ??? 1988? ???? Bright Toward Industrial ?? ????? RF MEMS ???? ?????. ???? ???????? ????????? ??? ?? ??? ?????? Opto-MOSFET? ?????? Opto-SiC MOSFET? ?????? ?????? ??????? ?????? Reed? ??????? RF MEMS? ???.
?????? B.T ????????? ??? ?????? ????? ???????? ????????? ?? ?????? ????? ?? ????? ???? ?????? ?????? ????? ????? ?? ???? OKITA Works ??????? ?? ???????????? ????? ???????????? ????? ?? ??????????????? JEL Systems ????? ?? ??????? ????? Teledyne Relays and Coax Switches ????? ?? ??????????.
???? ???? ????? ????? ?????? ??????? ???????????? ATE? ????? ????? ????????? (BMS)? ?????? ?????? ???????? ?????? ???????? ??????????. ??? ??? 1988? ???? B.T ???????? ??????? ????? ?????? ?? ??? Opto-MOSFET ? Opto-SiC MOSFET? ?? ????????? ?????? ????? ???? ?? 30 ?????? ??? ???? B.T ????? ????? ?? ????.
