???? ?????????
?? ??? ??? ????????? ???????, ?????? ??? ????? ????????? ???????. ????? ?? ?????? ???? ????? ??? pdf ??? ???? ????? ??????????. ???? ?????? ??? ???? ?????? ??? ???? ???? ????????? ???? ????.
Toward Technologies, Inc. ?? ???? ????? ??????? ?????? ??????? ???????? ??????? ???????? ??????? MEMS.. ????? ?????? ?????? ?????? Opto-MOSFET? ???????? ??????? ???????? ??????? RF MEMS. ??? ???? ??????? ???? ????? ?????? ?????? ????? ????????? ??????? ??????? ??????? ?????? ????? ?????????? ??????? ????????? ?????? ???????? ??????????.
?? ??? ??? ????????? ???????, ?????? ??? ????? ????????? ???????. ????? ?? ?????? ???? ????? ??? pdf ??? ???? ????? ??????????. ???? ?????? ??? ???? ?????? ??? ???? ???? ????????? ???? ????.
??? ?? ?????? ??? ??? 1988? Toward Technologies, Inc. ?? ???? ????? ????????. ???? ???????? ????????? ??? ?? ??? ?????? Opto-MOSFET? ??????? Opto-SiC MOSFET? ??????? ?????? ??????? ??????? Reed? ??????? RF MEMS? ??????.
???? Toward Technologies ?????? ???????? ??????? ????? ???????? ????????? ?? ?????? ????? ?? ????? ???? ?????? ?????? ????? ????? ?? OKITA Works ?????? ???????? Menlo Microsystems ?????? ??????????? JEL Systems ?????? ??????? ?Teledyne Relays ?Coax Switches ?????? ??????????. ???? ???? ????? ?????? ?????? ????? ????????? ATE? ????? ????? ????????? (BMS)? ?????? ???????? ??????? ???????? ??????????.
???? Toward Technologies ??????? ?????? Opto-MOSFET ?Opto-SiC MOSFET ????? ?????? ??? ??? 1988? ??? ??????????? ???????? ?37 ????? ?? ??????? ???? Toward Technologies ????? ???????? ?? ????.